

Key Features
Ultra-stable CVD sensing technology
Low internal volume (0.9cm³)
ATEX and IECEx Type Ex ec (increased safety) approval
Class 100 / ISO Class 5 cleanroom packed and double bagged
High EMI/RFI immunity rating
Markets & Applications
Machine Automation
High-Purity Gas Delivery Systems
Gas Sticks
Process gas analyzers
Exhaust gas for CVD and etching equipment
Ingress Protection
IP65
Case or Body Material
Stainless steel 304 (1.4301)
PBT (meets UL 94-V-0)
Stability
≤±0.25% span/year at reference conditions
Process Connection Style
Threaded
Threaded flow through
Surface Finish
0.5 μm Ra or optional 0.18 μm Ra
Accuracy
0.25% of span
Pressure Type
Gauge pressure
Absolute pressure
Process Connection Size
9⁄16-18 UNF (compatible with 1⁄4 VCR®) swivel male or female
Ranges
3 ... 200 bar / 45 ... 3000 psi
Compound
Electrical Termination
M12 Hirschmann® 993-172-100
Wetted Parts Material
Stainless steel 316L (1.4404)
Output Signal
4-20 mA (2-wire)
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